Basically,this system is used for ablation of multifunctional oxide materials for its thin film deposition,which is a physical vapor deposition(PVD)technique.Its applied energy density is of maximum 5 J/cm^2.Thin film thickness and its properties can be tuned by Laser pulse energy and frequency,Oxygen Partial pressure,Deposition and Annealing temperature,Target to substrate distance and on substrate property.
List of research areas where it can be useful
Generally, it is used for various types of thin film deposition techniques.
Contact Person
- Prof. Ashish Garg Department of MSE Indian Institute of Technology Kanpur Kanpur-208016 India
Location Info:
Western Labs Extension 105Timings:
Monday to Friday; from 8am to 5pmContact info:
WL-104,
MSE Dept.,
IIT Kanpur, Kanpur UP-208016
Tel: +91 512 2597904(Lab)